Semiconductor Etching Gas Trifluoroiodomethane

Molecular formula of trifluoroiodomethane is CF3I and its molecular weight is 195.91. Trifluoroiodomethane is a kind of colorless and odorless gas. It is non-toxic, fireproof, oil soluble and well-materials compatibility. It is one of the substitutes of traditional freon refrigerant with characteristics of high extinguishing efficiency, good safety performance and well economic benefit. As a kind of semiconductor etching gas, trifluoroiodomethane has higher selectivity and aspect ratio compares with the same etching gas CF4 and C4F6. Quality specification Items Units Index Purity≥ Vol.% 99.9 Oxygen+ Argon（O2+Ar）≤ Vol.ppm 300 Carbon monoxide（CO）≤ Vol.ppm 200 Nitrogen（N2）≤ Vol.ppm 200…